China electrics technology group corporation No.46 research institute

Company Description

1. Czochralski silicon single crystal materials(CZ-Silicon)Czochralski silicon single crystal materials produced by CETC46 aremainly applied to manufacture of integrated circuit (IC), LEDchips, MEMS chips and semiconductor devices. CETC46 could supply2-6 inches semiconductor grade silicon materials and 16 inchesoptics grade silicon materials including heavily doped siliconpolished wafer, radiation resist silicon polished wafer, doubleside polished MEMS silicon wafer, optical grade silicon material,etc.  Type Specification Total Thickness Variation (TTV) ≤5 µm TIR ≤5 µm WARP ≤20 µm BOW ≤10 µm Resistivity (8×10-4~50) Ohm·cm Particles ≤ 15/ wafer, ≥ 0.2µm Back Side Surface Polished / LTO / Etched Other SEMI Standard